CFW821 is a high specification FAB front-end graphic inspection equipment that can benchmark the 89xx machine of foreign competitor Kxx. It is equipped with dual TDI sensors, which can achieve synchronous imaging of bright and dark fields. One scan can simultaneously capture images of both bright and dark fields, and can scan and detect more defects. It is suitable for multiple process stations such as ADI/AEI/CMP of FAB front-end, and can help customers quickly screen typical graphic defects and surface defects that affect product quality on the production line, ensuring stable operation of various processes.

It can meet applications with high throughput and high defect detection rate.