CFY210 is an AOI equipment used in MaskShop production process inspection and shipment inspection. Chengfeng's photomask detection technology can help photomask manufacturers identify photomask particle defects and graphic defects. CFY210 supports multiple detection modes, SMIF automatic loading and unloading, and high-speed motion platform, which can meet the requirements of detection stability and production capacity, as well as ultra-high cleanliness, thereby helping customers improve yield.

Particle detection: Before applying the film, the highest resolution can reach 0.2um

Graphic detection: supports core and peripheral areas, with a maximum resolution of 0.2um