CFY401 is a UV Reticle detection device used in MaskShop production process inspection and shipment inspection. Chengfeng's photomask detection technology can help photomask manufacturers identify photomask particle defects and graphic defects. CFY401 supports multiple detection modes, SMIF automatic loading and unloading, and high-speed motion platform, which can meet the requirements of detection stability and production capacity, as well as ultra-high cleanliness, thereby helping customers improve yield.

Particle detection: Before applying the film, the highest resolution can reach 0.13um

Graphic detection: The highest resolution can reach 0.13um