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Wafer geometry measurement equipment CFW830

CFW830 can achieve fully automatic wafer thickness Bow、 Stress, warpage TTV、 Flatness Roughness measurement, equipped with a reversible robotic arm, can achieve measurement of crystal surface and crystal back.


CFW830

Specific parameters/specifications

√ Function: Thickness Bow、 Stress, warpage TTV、 Flatness and roughness measurement