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Application scenarios
■ TIA/PD/PIC/COC full detection
| Specifications | Detectable Defects |
√ TIA/PD/PIC/COC full detection √ Wafer Inspection Specialized Microscopic Imaging Module (2X/5X/10X) √ Maximum pixel resolution: 0.34um √ High speed and high-precision autofocus module √ Equipped with independent re evaluation software and computer √ UPH:160 | √ TIA: Cracks/damages/scratches/dents/silver glue, etc √ PD: Damaged/dirty/scratched, etc √ PIC: Damaged/dirty/scratched/crushed, etc √ COC: cracks/damages/scratches/dents/dirt, etc |