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| Specifications | Detectable Defects |
√ Supports 6-inch / 8-inch / 12 inch Wafer / Frame / Expansion Ring √ Microscopic imaging optical path (2X/5X/10X) √ Maximum pixel resolution: 0.34um √ High speed and high-precision autofocus module √ PIC/PD/LENS dedicated AOI | √ Damaged / Scratched / Dirtied / Foreign Object / Cracked / Oxidized / Bent / Defective Optical Port / Defective Waveguide |